Maskless Lithography system (Microlight 3D)

This system can expose laser beam (385 nm) and pattern UV curable polymers to spatial resolution as small as 3 micrometer. It is used for microfabrication. Smart Print UV is a maskless lithography equipment, based on a DMD projection technology, compatible with a wide range of resists and substrates. Smart Print UV can produce any 2D shapes at micron resolution without the need for a hard mask. Smart Print UV is perfectly designed for any application fields requiring surface micro patterning such as microfluidics, biotechnologies and microelectronics.

Faculty coordinator: Dr. Dileep Mampallil